Three stages in the fabrication of an hexagonal array of NiFe magnetic dots.

(left) A close-packed monolayer of 390 nm diameter polystyrene spheres deposited on a polymer film and a 30 nm thick NiFe underlayer. (middle) Reactive ion etching leaves a template of polymer posts capped by spheres. (right) NiFe dots of 120 nm diameter are formed after selective Ar ion milling through the sphere/polymer mask